Granted Patent
Utility
US 6,376,348 · App. 08/940,235
Reliable polycide gate stack with reduced sheet resistance and thickness
Inventors:
Martin Schrems, Matthias Ilg
Patented Case
View Patent ↗
Granted: Apr 23, 2002
Filed: Sep 30, 1997
Inventors
Martin Schrems
Matthias Ilg
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.