IP Library Granted Patent US 6,376,839
Granted Patent Utility
US 6,376,839 · App. 09/473,537

SEM for transmission operation with a location-sensitive detector

Inventors: Michael Frederick Hayles, Gerardus N. A. Van Veen
Patented Case View Patent ↗
Granted: Apr 23, 2002 Filed: Dec 28, 1999
Inventors
Michael Frederick Hayles
Gerardus N. A. Van Veen
Assignee (at issue)
Philips Electron Optics

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Quick Facts
Patent No.
US 6,376,839
App. No.
09/473,537
Filed
1999-12-28
Granted
2002-04-23
Kind
B1