Granted Patent
Utility
US 6,377,066 · App. 09/610,668
Method and apparatus for sub-micron imaging and probing on probe station
Inventors:
Greg E. Bridges, Douglas J. Thomson
Patented Case
View Patent ↗
Granted: Apr 23, 2002
Filed: Jul 5, 2000
Inventors
Greg E. Bridges
Douglas J. Thomson
Assignee (at issue)
MFI Technologies Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.