Granted Patent
Utility
US 6,378,534 · App. 09/694,938
Semiconductor wafer cleaning system
Inventors:
Michael B. Olesen, Mario E. Bran
Patented Case
View Patent ↗
Granted: Apr 30, 2002
Filed: Oct 23, 2000
Inventors
Michael B. Olesen
Mario E. Bran
Assignee (at issue)
Verteq, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.