Granted Patent
Utility
US 6,379,986 · App. 09/778,462
Method of forming tunnel oxide film for superconducting X-ray sensor element
Inventors:
Hiroyuki Suzuki, Masao Hasegawa
Patented Case
View Patent ↗
Granted: Apr 30, 2002
Filed: Feb 7, 2001
Inventors
Hiroyuki Suzuki
Masao Hasegawa
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.