Granted Patent
Utility
US 6,379,990 · App. 09/348,160
Method of fabricating a micromechanical semiconductor configuration
Inventors:
Karlheinz Muller, Stefan Kolb
Patented Case
View Patent ↗
Granted: Apr 30, 2002
Filed: Jul 6, 1999
Inventors
Karlheinz Muller
Stefan Kolb
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.