Granted Patent
Utility
US 6,383,902 · App. 09/623,045
Method for producing a microelectronic semiconductor component
Inventors:
Ekkehard Niemann, Dieter Panknin, Wolfgang Skorupa, Hans-Jurgen Wirth
Patented Case
View Patent ↗
Granted: May 7, 2002
Filed: Mar 13, 2000
Inventors
Ekkehard Niemann
Dieter Panknin
Wolfgang Skorupa
Hans-Jurgen Wirth
Assignee (at issue)
Daimlerchrysler AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.