Granted Patent
Utility
US 6,383,939 · App. 09/375,504
Method for etching memory gate stack using thin resist layer
Inventors:
Wenge Yang, Lewis Shen
Patented Case
View Patent ↗
Granted: May 7, 2002
Filed: Aug 17, 1999
Inventors
Wenge Yang
Lewis Shen
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.