Granted Patent
Utility
US 6,386,507 · App. 09/802,260
Microelectromechanical valves including single crystalline material components
Inventors:
Vijayakumar R. Dhuler, Mark D. Walters
Patented Case
View Patent ↗
Granted: May 14, 2002
Filed: Mar 8, 2001
Inventors
Vijayakumar R. Dhuler
Mark D. Walters
Assignee (at issue)
JDS Uniphase Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.