IP Library Granted Patent US 6,387,724
Granted Patent Utility
US 6,387,724 · App. 09/258,716

Method of fabricating silicon-on-insulator sensor having silicon oxide sensing surface

Inventor: Howard W. Walker
Patented Case View Patent ↗
Granted: May 14, 2002 Filed: Feb 26, 1999
Inventor
Howard W. Walker
Assignee (at issue)
Dynamics Research Corporation

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Quick Facts
Patent No.
US 6,387,724
App. No.
09/258,716
Filed
1999-02-26
Granted
2002-05-14
Kind
B1