Granted Patent
Utility
US 6,387,764 · App. 09/541,395
Trench isolation process to deposit a trench fill oxide prior to sidewall liner oxidation growth
Inventors:
Todd Curtis, Vivek R. Rao, Kerem Kapkin
Patented Case
View Patent ↗
Granted: May 14, 2002
Filed: Mar 31, 2000
Inventors
Todd Curtis
Vivek R. Rao
Kerem Kapkin
Assignee (at issue)
Silicon Valley Group, Thermal Systems LLP
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.