Granted Patent
Utility
US 6,387,771 · App. 09/327,711
Low temperature oxidation of conductive layers for semiconductor fabrication
Inventors:
Oliver Genz, Alexander Michaelis
Patented Case
View Patent ↗
Granted: May 14, 2002
Filed: Jun 8, 1999
Inventors
Oliver Genz
Alexander Michaelis
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.