IP Library Granted Patent US 6,387,787
Granted Patent Utility
US 6,387,787 · App. 09/797,558

Lithographic template and method of formation and use

Inventors: David Mancini, Doug Resnick, William J. Dauksher
Patented Case View Patent ↗
Granted: May 14, 2002 Filed: Mar 2, 2001
Inventors
David Mancini
Doug Resnick
William J. Dauksher
Assignee (at issue)
Motorola, Inc.

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Quick Facts
Patent No.
US 6,387,787
App. No.
09/797,558
Filed
2001-03-02
Granted
2002-05-14
Kind
B1