Granted Patent
Utility
US 6,388,252 · App. 09/197,584
Self-detecting type of SPM probe and SPM device
Inventors:
Hiroshi Takahashi, Yoshiharu Shirakawabe, Nobuhiro Shimizu, Michel Despont
Patented Case
View Patent ↗
Granted: May 14, 2002
Filed: Nov 19, 1998
Inventors
Hiroshi Takahashi
Yoshiharu Shirakawabe
Nobuhiro Shimizu
Michel Despont
Assignees (at issue)
SEIKO INSTRUMENTS INC.
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.