IP Library › Granted Patent US 6,396,160
Granted Patent Utility
US 6,396,160 · App. 09/395,420

Fill strategies in the optical kerf

Inventors: Steffen Schulze, Kathryn H. Varian, Timothy J. Wiltshire
Patented Case View Patent ↗
Granted: May 28, 2002 Filed: Sep 14, 1999
Inventors
Steffen Schulze
Kathryn H. Varian
Timothy J. Wiltshire
Assignee (at issue)
International Business Machines Corporation

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Quick Facts
Patent No.
US 6,396,160
App. No.
09/395,420
Filed
1999-09-14
Granted
2002-05-28
Kind
B1