Granted Patent
Utility
US 6,399,432 · App. 09/199,203
Process to control poly silicon profiles in a dual doped poly silicon process
Inventors:
Tammy Zheng, Subhas Bothra
Patented Case
View Patent ↗
Granted: Jun 4, 2002
Filed: Nov 24, 1998
Inventors
Tammy Zheng
Subhas Bothra
Assignee (at issue)
Philips Semiconductors
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.