Granted Patent
Utility
US 6,399,438 · App. 09/828,201
Method of manufacturing semiconductor integrated circuit device having a capacitor
Inventors:
Masayoshi Saito, Yoshitaka Nakamura, Hidekazu Goto, Keizo Kawakita, Satoru Yamada, Toshihiro Sekiguchi, Isamu Asano, Yoshitaka Tadaki, Takuya Fukuda, Masayuki Suzuki, Tsuyoshi Tamaru, Naoki Fukuda, Hideo Aoki, Masayoshi Hirasawa
Patented Case
View Patent ↗
Granted: Jun 4, 2002
Filed: Apr 9, 2001
Inventors
Masayoshi Saito
Yoshitaka Nakamura
Hidekazu Goto
Keizo Kawakita
Satoru Yamada
Toshihiro Sekiguchi
Isamu Asano
Yoshitaka Tadaki
Takuya Fukuda
Masayuki Suzuki
Tsuyoshi Tamaru
Naoki Fukuda
Hideo Aoki
Masayoshi Hirasawa
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.