Granted Patent
Utility
US 6,399,478 · App. 09/788,661
Method of making a dual damascene structure with modified insulation
Inventors:
Naoteru Matsubara, Hideki Mizuhara
Patented Case
View Patent ↗
Granted: Jun 4, 2002
Filed: Feb 21, 2001
Inventors
Naoteru Matsubara
Hideki Mizuhara
Assignee (at issue)
SANYO ELECTRIC CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.