Granted Patent
Utility
US 6,399,490 · App. 09/607,131
Highly conformal titanium nitride deposition process for high aspect ratio structures
Inventors:
Rajarao Jammy, Cheryl G. Faltermeier, Uwe Schroeder, Kwong Hon Wong
Patented Case
View Patent ↗
Granted: Jun 4, 2002
Filed: Jun 29, 2000
Inventors
Rajarao Jammy
Cheryl G. Faltermeier
Uwe Schroeder
Kwong Hon Wong
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.