Granted Patent
Utility
US 6,399,953 · App. 09/227,231
Scanning electronic microscope and method for automatically observing semiconductor wafer
Inventor:
Tadashi Kitamura
Patented Case
View Patent ↗
Granted: Jun 4, 2002
Filed: Jan 8, 1999
Inventor
Tadashi Kitamura
Assignee (at issue)
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.