Granted Patent
Utility
US 6,402,902 · App. 08/388,191
Apparatus and method for a reliable return current path for sputtering processes
Inventor:
Norman L. Boling
Patented Case
View Patent ↗
Granted: Jun 11, 2002
Filed: Feb 13, 1995
Inventor
Norman L. Boling
Assignee (at issue)
Deposition Sciences, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.