IP Library Granted Patent US 6,403,389
Granted Patent Utility
US 6,403,389 · App. 09/373,923

Method for determining on-chip sheet resistivity

Inventors: Keh-Jeng Chang, Robert G. Mathews, Shih-tsun Alexander Chou, Abhay Dubey
Patented Case View Patent ↗
Granted: Jun 11, 2002 Filed: Aug 12, 1999
Inventors
Keh-Jeng Chang
Robert G. Mathews
Shih-tsun Alexander Chou
Abhay Dubey
Assignee (at issue)
SEQUENCE DESIGN LTD.

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Quick Facts
Patent No.
US 6,403,389
App. No.
09/373,923
Filed
1999-08-12
Granted
2002-06-11
Kind
B1