Granted Patent
Utility
US 6,403,413 · App. 09/904,591
Manufacturing method of semiconductor integrated circuit device having a capacitor
Inventors:
Katsuya Hayano, Akira Imai, Norio Hasegawa
Patented Case
View Patent ↗
Granted: Jun 11, 2002
Filed: Jul 16, 2001
Inventors
Katsuya Hayano
Akira Imai
Norio Hasegawa
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.