Granted Patent
Utility
US 6,403,447 · App. 09/348,782
Reduced substrate capacitance high performance SOI process
Inventor:
Sameer D. Parab
Patented Case
View Patent ↗
Granted: Jun 11, 2002
Filed: Jul 7, 1999
Inventor
Sameer D. Parab
Assignee (at issue)
Elantec Semiconductor, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.