Granted Patent
Utility
US 6,406,641 · App. 08/877,537
Liquid etch endpoint detection and process metrology
Inventor:
Reza Golzarian
Patented Case
View Patent ↗
Granted: Jun 18, 2002
Filed: Jun 17, 1997
Inventor
Reza Golzarian
Assignee (at issue)
Luxtron Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.