IP Library Granted Patent US 6,407,004
Granted Patent Utility
US 6,407,004 · App. 09/570,040

Thin film device and method for manufacturing thin film device

Inventors: Tadashi Kimura, Isao Muragishi, Hiroyoshi Sekiguchi, Masaya Sakaguchi, Hiroyasu Tsuji, Satoru Mitani
Patented Case View Patent ↗
Granted: Jun 18, 2002 Filed: May 12, 2000
Inventors
Tadashi Kimura
Isao Muragishi
Hiroyoshi Sekiguchi
Masaya Sakaguchi
Hiroyasu Tsuji
Satoru Mitani
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.

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Quick Facts
Patent No.
US 6,407,004
App. No.
09/570,040
Filed
2000-05-12
Granted
2002-06-18
Kind
B1