Granted Patent
Utility
US 6,408,863 · App. 09/610,175
Seal configuration for use with a motor drive assembly in a microelectronic work piece processing system
Inventor:
Aleksander Owczarz
Patented Case
View Patent ↗
Granted: Jun 25, 2002
Filed: Jul 5, 2000
Inventor
Aleksander Owczarz
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.