Granted Patent
Utility
US 6,409,891 · App. 08/236,780
Low energy plasma cleaning method for cryofilms
Inventors:
Barret Lippey, Darrell A. Gleichauf, Weldon S. Williamson
Patented Case
View Patent ↗
Granted: Jun 25, 2002
Filed: Apr 29, 1994
Inventors
Barret Lippey
Darrell A. Gleichauf
Weldon S. Williamson
Assignee (at issue)
HUGHES ELECTRONICS LIMITED
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.