IP Library › Granted Patent US 6,409,897
Granted Patent Utility
US 6,409,897 · App. 09/666,977

Rotatable sputter target

Inventor: Larry S. Wingo
Patented Case View Patent ↗
Granted: Jun 25, 2002 Filed: Sep 20, 2000
Inventor
Larry S. Wingo
Assignee (at issue)
Poco Graphite, Inc.

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Quick Facts
Patent No.
US 6,409,897
App. No.
09/666,977
Filed
2000-09-20
Granted
2002-06-25
Kind
B1