Granted Patent
Utility
US 6,409,936 · App. 09/252,022
Composition and method of formation and use therefor in chemical-mechanical polishing
Inventors:
Karl M. Robinson, Whonchee Lee
Patented Case
View Patent ↗
Granted: Jun 25, 2002
Filed: Feb 16, 1999
Inventors
Karl M. Robinson
Whonchee Lee
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.