Granted Patent
Utility
US 6,409,965 · App. 09/666,241
Sputtering target and its manufacturing method
Inventors:
Takahiro Nagata, Manabu Sasaki, Hitoshi Kimura, Norio Yokoyama
Patented Case
View Patent ↗
Granted: Jun 25, 2002
Filed: Sep 21, 2000
Inventors
Takahiro Nagata
Manabu Sasaki
Hitoshi Kimura
Norio Yokoyama
Assignee (at issue)
SONY GROUP CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.