Granted Patent
Utility
US 6,410,421 · App. 09/560,939
Semiconductor device with anti-reflective structure and methods of manufacture
Inventors:
Kouros Ghandehari, Samit Sengupta
Patented Case
View Patent ↗
Granted: Jun 25, 2002
Filed: Apr 28, 2000
Inventors
Kouros Ghandehari
Samit Sengupta
Assignee (at issue)
KONINKLIJKE PHILIPS ELECTRONICS NV
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.