Granted Patent
Utility
US 6,410,443 · App. 09/507,810
Method for removing semiconductor ARC using ARC CMP buffing
Inventors:
Steven C. Avanzino, Stephen Keetai Park, Kashmir Sahota, David Matsumoto, Mark T. Ramsbey
Patented Case
View Patent ↗
Granted: Jun 25, 2002
Filed: Feb 22, 2000
Inventors
Steven C. Avanzino
Stephen Keetai Park
Kashmir Sahota
David Matsumoto
Mark T. Ramsbey
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.