Granted Patent
Utility
US 6,411,490 · App. 09/792,478
Integrated power modules for plasma processing systems
Inventor:
Robert D. Dible
Patented Case
View Patent ↗
Granted: Jun 25, 2002
Filed: Feb 23, 2001
Inventor
Robert D. Dible
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.