Granted Patent
Utility
US 6,413,839 · App. 09/178,287
Semiconductor device separation using a patterned laser projection
Inventors:
Michael Gregory Brown, Ivan Eliashevich, Mark Gottfried, Robert F. Karlicek, Jr., James Nering
Patented Case
View Patent ↗
Granted: Jul 2, 2002
Filed: Oct 23, 1998
Inventors
Michael Gregory Brown
Ivan Eliashevich
Mark Gottfried
Robert F. Karlicek, Jr.
James Nering
Assignee (at issue)
EMCORE CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.