Granted Patent
Utility
US 6,414,276 · App. 09/520,077
Method for substrate thermal management
Inventor:
Dikran Babikian
Patented Case
View Patent ↗
Granted: Jul 2, 2002
Filed: Mar 7, 2000
Inventor
Dikran Babikian
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.