Granted Patent
Utility
US 6,414,307 · App. 09/350,718
Method and apparatus for enhancing yield of secondary ions
Inventors:
Robert L. Gerlach, Locke Christman, Mark W. Utlaut
Patented Case
View Patent ↗
Granted: Jul 2, 2002
Filed: Jul 9, 1999
Inventors
Robert L. Gerlach
Locke Christman
Mark W. Utlaut
Assignee (at issue)
FEI Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.