Granted Patent
Utility
US 6,414,979 · App. 09/768,753
Gas discharge laser with blade-dielectric electrode
Inventors:
Richard C. Ujazdowski, Michael C. Cates, Richard G. Morton, Jean-Marc Hueber, Ross H. Winnick
Patented Case
View Patent ↗
Granted: Jul 2, 2002
Filed: Jan 23, 2001
Inventors
Richard C. Ujazdowski
Michael C. Cates
Richard G. Morton
Jean-Marc Hueber
Ross H. Winnick
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.