Granted Patent
Utility
US 6,415,432 · App. 09/551,880
Lithography pattern data generation method, lithography pattern fabrication method and charged particle lithography system
Inventors:
Takashi Saito, Hisashi Watanabe
Patented Case
View Patent ↗
Granted: Jul 2, 2002
Filed: Apr 18, 2000
Inventors
Takashi Saito
Hisashi Watanabe
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.