Granted Patent
Utility
US 6,416,617 · App. 09/725,844
Apparatus and method for chemical/mechanical polishing
Inventors:
Hideaki Yoshida, Masashi Hamanaka
Patented Case
View Patent ↗
Granted: Jul 9, 2002
Filed: Nov 30, 2000
Inventors
Hideaki Yoshida
Masashi Hamanaka
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.