Granted Patent
Utility
US 6,416,618 · App. 09/354,574
Wafer processing apparatus
Inventors:
Masaaki Tsuchihashi, Minoru Hanazaki, Hideki Oura
Patented Case
View Patent ↗
Granted: Jul 9, 2002
Filed: Jul 16, 1999
Inventors
Masaaki Tsuchihashi
Minoru Hanazaki
Hideki Oura
Assignees (at issue)
MITSUBISHI ELECTRIC CORPORATION
Mitsubishi Denki Engineering Kabushiki Kaisha
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.