Granted Patent
Utility
US 6,416,640 · App. 08/964,962
Sputter station
Inventor:
Roman Schertler
Patented Case
View Patent ↗
Granted: Jul 9, 2002
Filed: Nov 5, 1997
Inventor
Roman Schertler
Assignee (at issue)
Unakis Balzers AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.