Granted Patent
Utility
US 6,417,013 · App. 09/239,723
Morphed processing of semiconductor devices
Inventors:
Michael Teixeira, Mike DeVre, Wade Dawson, Dave Johnson
Patented Case
View Patent ↗
Granted: Jul 9, 2002
Filed: Jan 29, 1999
Inventors
Michael Teixeira
Mike DeVre
Wade Dawson
Dave Johnson
Assignee (at issue)
PLASMA-THERM LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.