Granted Patent
Utility
US 6,417,682 · App. 09/314,887
Semiconductor device testing apparatus and its calibration method
Inventors:
Toshikazu Suzuki, Hiroyuki Nagai, Noriyoshi Kozuka, Yukio Ishigaki, Shigeru Matsumura, Takashi Sekizuka, Hiroyuki Shiotsuka, Hiroyuki Hama, Eiichi Sekine
Patented Case
View Patent ↗
Granted: Jul 9, 2002
Filed: May 19, 1999
Inventors
Toshikazu Suzuki
Hiroyuki Nagai
Noriyoshi Kozuka
Yukio Ishigaki
Shigeru Matsumura
Takashi Sekizuka
Hiroyuki Shiotsuka
Hiroyuki Hama
Eiichi Sekine
Assignee (at issue)
Advantest Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.