Granted Patent
Utility
US 6,418,356 · App. 09/336,353
Method and apparatus for resolving conflicts in a substrate processing system
Inventor:
Hilario Oh
Patented Case
View Patent ↗
Granted: Jul 9, 2002
Filed: Jun 18, 1999
Inventor
Hilario Oh
Assignee (at issue)
Silicon Valley Group, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.