IP Library Granted Patent US 6,419,461
Granted Patent Utility
US 6,419,461 · App. 09/882,159

Turbo molecular pump

Inventor: Takashi Okada
Patented Case View Patent ↗
Granted: Jul 16, 2002 Filed: Jun 15, 2001
Inventor
Takashi Okada
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 6,419,461
App. No.
09/882,159
Filed
2001-06-15
Granted
2002-07-16
Kind
B2