Granted Patent
Utility
US 6,420,097 · App. 09/562,659
Hardmask trim process
Inventors:
Christopher Lee Pike, Scott A. Bell
Patented Case
View Patent ↗
Granted: Jul 16, 2002
Filed: May 2, 2000
Inventors
Christopher Lee Pike
Scott A. Bell
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.