Granted Patent
Utility
US 6,420,864 · App. 09/548,773
Modular substrate measurement system
Inventors:
Michael Abraham, Ivo Raaijmakers, Alain Gaudon, Pierre Astegno
Patented Case
View Patent ↗
Granted: Jul 16, 2002
Filed: Apr 13, 2000
Inventors
Michael Abraham
Ivo Raaijmakers
Alain Gaudon
Pierre Astegno
Assignees (at issue)
Nanophotonics Co., Ltd.
Recif SA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.