Granted Patent
Utility
US 6,421,180 · App. 09/533,447
Apparatus for generating a laser pattern on a photomask and associated methods
Inventors:
Robert M. Montgomery, Lee M. Burberry
Patented Case
View Patent ↗
Granted: Jul 16, 2002
Filed: Mar 23, 2000
Inventors
Robert M. Montgomery
Lee M. Burberry
Assignee (at issue)
HARRIS CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.