Granted Patent
Utility
US 6,423,148 · App. 09/388,485
Substrate-cleaning method and substrate-cleaning solution
Inventor:
Hidemitsu Aoki
Patented Case
View Patent ↗
Granted: Jul 23, 2002
Filed: Sep 2, 1999
Inventor
Hidemitsu Aoki
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.